AMAT 0021-38946 SCREW CAPTIVE, PAN HD .190-32
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AMAT 0015-00421 / 0100-38033 CHAMBER SET INTERFACE BOARD
AMAT P/N:0100-00014 OPTD DETECT BD
AMAT 0100-00372 I/O Expansion Board
AMAT 0100-00368 PCB ASSY CHAMBER TEMPERATURE MONITOR
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