AMAT_0020-18622_PLATE,OTB CENTER REAR,ULTIMA HDP-CVD
AMAT
AMAT 0100-00493(0100-18025) PCBA CH INTRFC 5200 HDPCVD LOW-K
AMAT 0190-07679 CONTROL STATION INTERFACE SPECIFICATION
AMAT 0015-00421 / 0100-38033 CHAMBER SET INTERFACE BOARD
AMAT P/N: 0100-00294, Mainframe Seriplex Backplane Board
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