BRAND : AMAT P/N : 0020-84088 DESCRIPTION : DUAL PRESSURE PLATE CONDITION : 2ND SOURCE NEW
AMAT
AMAT_0270-20152_TOOL CAL 101 LIFT TO ROBOT
AMAT 0015-00421 / 0100-38033 CHAMBER SET INTERFACE BOARD
AMAT 0100-00372 I/O Expansion Board
AMAT_0100-00244, Producer wafer slide detect signal
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