BRAND: AMAT P/N : 0021-10140 DESCRIPTION : DOOR, SLIT VALVE CONDITION : 2ND SOURCE NEW
AMAT
AMAT_0040-84227_PLATE ROBOT CALIBRATION 300MM RADIANCE
AMAT_0200-35018_INSERT, QTZ EXHAUST
AMAT 0100-00368 PCB ASSY CHAMBER TEMPERATURE MONITOR
AMAT_0100-00244, Producer wafer slide detect signal
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