BRAND : AMAT P/N : 0020-21681 DESCRIPTION : CLAMP SUPPORT CHUCK CONDITION : 2ND SOURCE NEW
AMAT
AMAT_0200-35018_INSERT, QTZ EXHAUST
AMAT_0100-00244, Producer wafer slide detect signal
AMAT P/N:0100-00014 OPTD DETECT BD
AMAT 0100-00368 PCB ASSY CHAMBER TEMPERATURE MONITOR
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